Inversion Semiconductor披露粒子加速器X射线光刻方案挑战ASML EUV路线

Inversion Semiconductor targets ASML with particle-accelerator X-ray lithography
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Levi Li
, DIGITIMES, Taipei
Aug 3, 2026, 15:48
0
Credit: Inversion Semiconductor
Inversion Semiconductor is developing a particle-accelerator lithography platform that it says could deliver shorter wavelengths, higher throughput and denser chips than today's extreme ultraviolet systems, offering a new route beyond ASML's EUV architecture.
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